Specimen inspection equipment and how to make the electron beam absorbed current images

ABSTRACT

An object of the present invention is to obtain a clear absorbed current image without involving the difference in gain of amplifier between inputs, from absorbed currents detected by using a plurality of probes and to improve measurement efficiency. 
     In the present invention, a plurality of probes are brought in contact with a specimen. While irradiating the specimen with an electron beam, currents flowing in the probes are measured. Signals from at least two probes are input to a differential amplifier. An output of the differential amplifier is amplified. On the basis of the amplified output and scanning information of the electron beam, an absorbed current image is generated. According to the invention, a clear absorbed current image can be obtained without involving the difference in gain of amplifier between inputs. Thus, measurement efficiency in a failure analysis of a semiconductor device can be improved.

CROSS REFERENCE OF RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.12/038,079 filed Feb. 27, 2008.

CLAIM OF PRIORITY

The present application claim priority from Japanese application serialNo. 2007-048369, filed on Feb. 28, 2007, the content of which is herebyincorporated by reference into this application.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to specimen inspection equipment foranalyzing a semiconductor device or the like and how to make electronbeam absorbed current images using the same. For example, the inventionrelates to the technique of identifying a location of electrical failurein a wiring pattern on a semiconductor device or the like.

2. Description of the Related Art

In a semiconductor device on whose semiconductor surface a circuit isformed, it is becoming more difficult to identify a failure location asthe device is becoming finer, so that it takes long time to perform thefailure analysis. For the analysis, analysis equipment such as OBIRCH(Optical Beam Induced Resistance Change) equipment, an EB tester, or thelike has been used at present.

As a failure analysis on a wiring pattern in the failure analysis on thesemiconductor device, in recent years, attention is being paid to thetechnique of irradiating the surface of the semiconductor device with anelectron beam, analyzing current absorbed by the wiring pattern or asecondary signal emitted from the semiconductor device, and forming animage from the current/signal.

Japanese Patent Application Laid-Open No. 2002-368049 discloses thetechnique of identifying a failure location in a semiconductor device bybringing probes into contact with both ends or one end of a pattern,scanning the pattern on the semiconductor device with an electron beam,measuring current flowing in the probes, and forming an image.

Japanese Patent Application Laid-Open No. 2004-296771 discloses thetechnique of amplifying signals from a plurality of probes, obtainingthe difference between the signals, performing a scanning with thedifferential amplification signals, and displaying an image, and thetechnique of modulating an electron beam, performing a scanning with themodulated electron beam, and displaying an image.

As described in the conventional techniques, at the time of measuringcurrent outputted from a probe, when one probe is connected to a currentamplifier, another probe is grounded, and signals from the probes aremeasured by the current amplifier, the situation is as follows.

When probes are in contact with both ends of a wiring pattern and asemiconductor device is irradiated/scanned with an electron beam in thatstate, some of current supplied to the wiring pattern (absorbed current)flows from the point where the electron beam strikes to the ground, andthe other flows toward the current amplifier. In this case, the originalresistance of the wiring pattern is divided between portions each fromthe point where the electron beam strikes to the contact point ofdifferent one of said probes. The absorbed current supplied from theelectron beam to the wiring pattern is bifurcated according to thedivided resistance values, and the resultant currents each are passed toeither the ground or the current amplifier. With the measuring method,when a failure exists in the wiring pattern, a difference due to theabnormal resistance value can be observed, so that a location of thefailure can be identified. However, when the resistance of the patternis smaller than input impedance of the current amplifier, the absorbedcurrent flows to the ground more than to the current amplifier. When thedifference between the resistance of the pattern and input impedance ofthe current amplifier is large, the difference between absorbed currentseach flowing in either the ground or the current amplifier increases,and flow of the absorbed current to the current amplifier is suppressed.Consequently, a wiring pattern having a small resistance value cannot bemeasured, and a failure location cannot be identified.

Similarly, in the case of the measurement using two probes, inputs ofthe differential amplifier are connected to the outputs of eachamplifier in the conventional configuration. Currents outputted from theprobes are amplified by the different amplifiers and, after that, theamplified currents are supplied to the differential amplifier. In thiscase, the signals which are amplified by the different gain according tothe individual difference among the amplifiers connected to the input ofthe differential amplifier are input to the differential amplifier. As aresult, there is a case such that the differential signal between thesignals obtained by amplifying the currents input from the probes attheir respective different gains is amplified by the differentialamplifier, and that a value different from the actual current ismeasured.

In the case where one of input signals to the differential amplifier isamplified extremely larger than the other signal, the output goes offthe scale to the positive or negative side. To avoid such a state ofthings, the amplifiers have to be adjusted to have the same gain and thesame offset. Consequently, measurement itself is also complicated.

Further, since the differential amplifier is used, when the probes comeinto contact with both ends of a wiring pattern, a loop is formedbetween input terminals of the differential amplifier through aconnection cable from the probes to the input terminals. As the loop isinfluenced by the magnetic field, in the case where a magnetic shield isnot provided, currents determined by both an induced electromotive forcegenerated by the magnetic field and the impedance of the wiring patternmay be directly superimposed as noise upon the signals of the inputcurrent from the probes.

SUMMARY OF THE INVENTION

An object of the present invention is to obtain a clear absorbed currentimage without involving the different gain between inputs, from absorbedcurrents detected by using a plurality of probes and to improvemeasurement efficiency.

In the present invention, a plurality of probes are kept in contact witha specimen. While irradiating the specimen with an electron beam,currents flowing in the probes are measured. Signals from at least twoprobes are input to a differential amplifier, and an output of thedifferential amplifier is amplified. On the basis of the amplifiedoutput and scanning information of the electron beam, an absorbedcurrent image is generated.

In the present invention, a plurality of probes are kept in contact witha specimen. While irradiating the specimen with an electron beam,currents flowing in the probes are measured. A signal depending oncurrent flowing in one probe is input to the input side of an amplifier,and a signal depending on current flowing in another probe is input tothe GND of the amplifier. On the basis of the output from the amplifierand scanning information of the electron beam, an absorbed current imageis generated.

In the present invention, a specimen is irradiated with an electron beamin a state where probes are apart from the specimen and noiseinformation is generated. The specimen is irradiated with an electronbeam in a state where the probes are in contact with the specimen andabsorbed current information is generated. On the basis of the absorbedcurrent information and the noise information, an absorbed current imageis generated.

According to the invention, a clear absorbed current image can beobtained without involving the different gain between inputs. Thus,measurement efficiency in a failure analysis of a semiconductor devicecan be improved.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a schematic configuration of specimeninspection equipment according to an embodiment of the presentinvention;

FIG. 2 is a diagram showing the configuration of the specimen inspectionequipment of the embodiment including the configuration illustrated inFIG. 1; and

FIG. 3 shows an example of a method of reducing the influence ofagitation noise on an absorbed current image 7.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will be described hereinbelow withreference to the appended drawings.

First Embodiment

FIG. 1 is a diagram showing a schematic configuration of specimeninspection equipment according to an embodiment of the presentinvention.

Primary electrons 1 are emitted to a specimen 2. A pattern 3 is formedon the surface of the specimen 2, and probes 4 are brought into contactwith both ends of the pattern 3 or pads. In this state, the surface ofthe specimen 2 including the pattern 3 is scanned with the primaryelectrons 1 from an electronic source 5. Electrons entering the pattern3 among the emitted primary electrons 1 are detected as currents by theprobes 4, and the detected current signals are supplied to adifferential amplifier 6 and amplified. The differential amplifier 6generates a differential signal from the input signals and outputs it.The differential signal is displayed as an absorbed current image 7 on amonitor 8, in synchronization with the scanning of the primary electrons1.

The current passed through the pattern 3 and detected by the probe 4,which has been bifurcated according to the resistance values of portionsof the pattern 3, each portion being from the point where the primaryelectrons 1 strike to different one of the probes 4, is input to thepositive input or the negative input of the differential amplifier 6. Asa result, according to a change in the resistance value between thecontacts of the probes 4 in the pattern 3, contrast occurs in theabsorbed current image 7. Since the resistance value is not uniform in afailure part in the pattern 3, the contrast is displayed in a mannerdifferent from the other normal part. Consequently, the different state,that is, the failure location in the pattern 3 can be easily determinedin the absorbed current image 7.

FIG. 2 is a diagram showing the configuration of the specimen inspectionequipment of the embodiment including the configuration illustrated inFIG. 1.

In FIG. 2, the specimen inspection equipment has electron optics capableof emitting an electron beam. That is, the primary electrons 1 emittedfrom the electronic source 5 pass through condenser lenses 9 and 10, anaperture 11, a scan deflector 12, an image shift deflector 13, and anobjective lens 14 and are irradiated with to the specimen 2. The surfaceof the specimen 2 is scanned with the primary electrons 1 by the scandeflector 12 and the like.

A secondary electron beam 15 is emitted from the specimen 2 irradiatedwith the primary electrons 1 and is detected by a secondary electrondetector 16.

The secondary electron detector 16 as a detector capable of detectingsecondary electrons generated from the specimen is controlled by an SEMcontrol unit 17. The SEM control unit 17 has a video board 18 and amemory 19. The signal input from the secondary electron detector 16 isconverted to a digital signal by the video board 18, and an image isdisplayed on the monitor 8 in synchronization with the scanning usingthe primary electrons 1. Since the image is displayed on the monitor 8in synchronization with the primary electrons 1 used for the scanning,the secondary electron beam 15 is displayed as an SEM image. The signaland the SEM image are recorded in the memory 19. The whole specimeninspection equipment is also controlled by the SEM control unit 17.

The specimen 2 is fixedly held by a specimen holder 20 and can be movedin three axis directions of X, Y, and Z axis by a specimen stage 21 onwhich the specimen can be mounted. The probe 4 which can be brought intocontact with the specimen can be moved in three axis directions of X, Y,and Z by a probe stage 22 similar to the specimen stage 21.

Each of the specimen stage 21 and the probe stage 22 is moved/controlledin the three axis directions of X, Y, and Z to make the probe 4 comeinto contact with the surface of the specimen 2.

The probes 4 are brought in contact with one end or both ends of awiring pattern formed on the surface of the specimen 2. In this state,the surface of the specimen 2 including the pattern 3 is scanned withthe primary electrons 1 emitted from the electronic source 5. Electronsentering the pattern 3 among the emitted primary electrons 1 aredetected as current by the probe 4. The current flowing in the probe ismeasured by a measuring instrument. The current flowing in the pattern 3and being detected by the probe 4 has been bifurcated according to theresistance values of portions of the pattern 3, each portion being fromthe point where the primary electrons 1 strike to different one of theprobes 4, and the resultant signals are input to the differentialamplifier 6. The differential amplifier 6 to which the signals from themeasuring instrument are input generates a differential signal from theinput signals and outputs the generated differential signal. Thedifferential signal output from the differential amplifier 6 isamplified by an amplifier 23 at gain necessary to display the absorbedcurrent image 7 based on the absorbed currents from the probes 4. Insynchronization with the scan using the primary electrons 1, theabsorbed current image 7 is displayed on the monitor 8 as an imagingdevice for outputting an absorbed current image on the basis of both thesignal from the differential amplifier and a signal depending on thescan of the electron optics.

As described above, the SEM control unit 17 has the video board 18 andthe memory 19. The signal input from the probe 4 is converted to adigital signal by the video board 18 and displayed on the monitor 8 insynchronization with the scan of the primary electrons 1. As a result, adistribution of signals (absorbed current signals) obtained from thecurrents (absorbed currents) input from the probes can be displayed asan image (which will be called the absorbed current image 7). Thesignals and the absorbed current image 7 are recorded in the memory 19.

Consequently, according to a change in the resistance value between thecontacts of the probes 4 in the pattern 3, contrast is generated in theabsorbed current image 7. Since the resistance value is not uniform inthe failure part in the pattern 3, the contrast is displayed in a mannerdifferent from the other normal part. Therefore, the different state,that is, the failure location in the pattern 3 can be easily determinedin the absorbed current image 7.

The SEM control unit 17 has the function of switching a signal inputsystem for displaying an image between the secondary electron detector16 and the differential amplifier 6. At the time of displaying theabsorbed current image 7 on the basis of the current from the probe 4,the SEM control unit 17 switches the probe 4 to the differentialamplifier 6 side.

By displaying the signal for generating the input absorbed current image7 on the monitor 8 in synchronization with the scanning using theprimary electrons 1, the absorbed current image 7 is displayed.

A switch 24 is mounted at the front of the differential amplifier 6.While the specimen 2 is irradiated with the primary electrons 1, theprobe 4 is also irradiated with the primary electrons 1, so that thereis the possibility that the probe 4 is charged. The charged probe 4 isdischarged when it approaches the specimen 2. The probe 4 has a diameterof several hundreds of nm and is very thin, so that the probe 4 may bedamaged by the discharge. Many of the specimens 2 are not resistive tostatic electricity and may be damaged by discharge. That is, when thecharged probe 4 is brought near to the specimen 2, the probe 4 and thespecimen 2 may be damaged. The switch 24 is to be grounded until theprobe 4 is brought into contact with the specimen 2. After the probe 4comes into contact with the specimen 2, the switch 24 is switched to thedifferential amplifier 6 side. In such a manner, the probe 4 can bebrought in contact with the specimen 2 without being charged.

The switch 24 can be selectively connected to the differential amplifier6 and a current amplifier 25.

In the case of keeping probes in contact with both ends of the pattern 3and conducting measurement using the current amplifier 25, in the switch24, one of the probes in contact with both ends of the pattern 3 isconnected to the current amplifier 25 and the other probe is connectedto the GND of the current amplifier via a resistor. The resistor isselectable and can be switched according to the resistance value of thespecimen.

By bringing the probes 4 into contact with both ends of the pattern 3 onthe surface of the specimen 2, a circuit forming a loop connecting theinputs of the differential amplifier 6 is generated. In the case wherean external magnetic field is generated around the circuit, an inducedelectromotive force is generated by the loop involving the wiringpattern and the like connecting the inputs of the differential amplifier6. On the basis of the impedance of the loop, currents flow by theinduced electromotive force and are supplied via inputs of thedifferential amplifier 6. The currents are superimposed as noise uponthe absorbed current image 7. In the semiconductor test equipment, theportion from the probes 4 to the inputs of the differential amplifier 6is covered with a shield 26. By the shield 26, the influence of themagnetic field on the loop is largely reduced and the inducedelectromotive force is reduced. Thus, the noise superimposed is largelyreduced.

In the present embodiment, because of receiving signals flowing in theprobes directly by the differential amplifier, no difference occurs insignal gain between the input systems. By amplifying the differencebetween the input signals themselves, an output having no bias inamplification/output can be obtained. Thus, the image quality improvesdramatically. The influence on input signals can be decreased ascompared with the conventional technique, so that an absorbed currentimage formed by an input signal smaller than that in the conventionaltechnique can be observed. As a result, an absorbed current image of ato-be-measured specimen with a resistance value smaller than that in theconventional technique can be also observed. As for the adjustment ofamplifier, since the first amplifier is differential amplifier and theinfluence of the amplifier on an offset is dominant, the offsetadjustment on each of the input systems is unnecessary and only theadjustment in a lump is needed. Therefore, only the adjustment for thedifferential amplifier is all that is needed. Complication of the deviceadjustment in observation of the absorbed current image can be lessened,and the convenience improves dramatically.

While connecting one of probes to the ground via the resistor, andconnecting another probe to the current amplifier, the input signalsfrom the probes are displayed as an image in synchronization with thescanning means. Thus, the currents having flowed in from the probes flownot only to the ground side but also to the current amplifier side.Consequently, by selecting the resistance value to the ground, the rangeof resistance values of specimens which can be measured is widened, anda specimen having a resistance value smaller than that in theconventional technique can be measured.

Second Embodiment

In the detection system of the first embodiment, the gain has to behigh, so that the configuration is sensitive to agitation noise. FIG. 3shows an embodiment reducing the influence of the agitation noise on theabsorbed current image 7. Only the points different from the firstembodiment will be described below.

Before the probes 4 are made into contact with the specimen 2, theprimary electrons 1 are emitted once, and an absorbed current imageformed by signals from the probes 4 is measured. The signal input fromthe probe 4 is converted to a digital signal by the video board 18 andthe digital signal is recorded in the memory 19. The signal is used as abackground signal, and an image formed by the signal is shown as abackground image 27. A signal is generated by inverting the polarity ofsignal data of the background signal once recorded in the memory 19 bythe SEM control unit 17, and the generated signal is recorded in thememory 19. The signal is set as a reverted background signal, and animage formed by the reverted background signal is shown as a revertedbackground image 28. The signal consists of only the signal component ofthe agitation noise which does not depend on the sample, from theperiphery.

Next, the probes 4 are brought into contact with the specimen 2, theabsorbed current at that time is measured, input signals from the probes4 at that time are similarly converted to digital signals by the videoboard 18, and the digital signals are recorded in the memory 19. Thesignal is set as an absorption current signal, and an image formed bythe signal is shown as the absorbed current image 7. On the absorbedcurrent signal, the agitation noise obtained before is alsosuperimposed. The reverted background signal recorded before is readfrom the memory 19 and added to the absorbed current signal. Theresultant signal is displayed on the monitor 8 in synchronization withthe scanning using the primary electrons 1 (absorbed currentimage+reverted background image 29). As a result, the backgroundcorresponding to an agitation noise is cancelled out, and the agitationnoise can be largely reduced.

In the embodiment, by subtracting the background noise from the absorbedcurrent image, deterioration in the image quality caused by the noisecan be largely reduced.

1. A specimen inspection equipment comprising: a specimen stage on whicha specimen can be mounted; a plurality of probes; a probe stage whichmoves the probes so as to be brought into contact with the specimen; anelectron optics which emits an electron beam onto a pattern of thespecimen which is brought into contact with the probes; and an imagingdevice which outputs an absorbed current image on the basis of currentflowing in the probes.
 2. The specimen inspection equipment according toclaim 1, further comprising: a differential amplifier which outputs adifferential signal between the plurality of probes, wherein the imagingdevice outputs the absorbed current image on the basis of an output ofthe differential amplifier.
 3. The specimen inspection equipmentaccording to claim 1, further comprising: a detector which detects anelectron generated based on the emission of the electron beam; and acontroller which switches between an output of the detector and anoutput of the differential amplifier, wherein the imaging deviceswitches a display image between the absorbed current image and asecondary electron image in response to the switching operation by thecontroller.
 4. A specimen inspection equipment comprising; a specimenstage on which a specimen can be mounted; a plurality of probes; a probestage which moves the probes so as to be brought into contact with thespecimen; an electron optics which emits an electron beam onto a patternof the specimen which is brought into contact with the probes; adetector which detects an electron generated based on the emission ofthe electron beam; and an imaging device which displays a sum signal ofan absorbed current image signal based on current flowing in the probesand a reverted background image signal based on an output of thedetector.
 5. The specimen inspection equipment according to claim 4,further comprising: a differential amplifier which outputs adifferential signal between the plurality of probes; and a memory Whichstores an output of the differential amplifier and the output of thedetector.